MCRT Clean Air Management Systems (CAMS) : Special solutions
MCRT develops and produces special solutions for clean air systems, which can ve adapted directly to your processing tool (also available in the same design).
Loading stations of highest clean room classes
- Avoids particle contamination during loading of the tool
- Highest clean room class in the loading zone while doors are open
- Highest clean room class within the tool when doors are closed
References
MCRT Mini-environments and Clean Air Management Systems (CAMS) are used for the following systems in semiconductor industry:
- Prober
- Etching tools
- Wafer handling systems
- Implanter
- Wet rocess tools
- Metrology tools